If the police know it's him, I'm not sure why they haven't arrested him yet.
However, it does seem like you would need some harder evidence in order for the police to obtain a conviction, or for you to even be able to obtain a restraining order against them.
Furthermore, even if you did have a restraining order, since they seem to be able to trespass unnoticed and escape (although leaving clothes and dishes behind) this would be hard to prove.
You could try to bring a civil suit against them for trespass, but even though the burden of proof
is lower, you would run into the same problems with proving the case.
If you have their addresses, you can at least send them a cease and desist letter telling them to stop entering your property without your permission.
I'm also not sure how they could have damaged the security equipment without it getting images of them first.